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Product Details:
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High Purity Niobium Sputtering Targets, Niobium Disc
1. Material: RO4200-1, RO4210-2
2. Size:
1) circular targets: Diameter 10mm up to 400mm x Thickness 2mm up to 28mm;
2) rectangular targets: Thickness 1mm up to 20.32mm x Width up to 800mm x Length up to 3000mm
Special size target can be made according to your requirements.
3. Purity: ≥99.9% or 99.95%
4. Table 1: technology parameter
Recrystallization |
95%min |
Grain size |
ASTM 4 or finer |
Surface finish |
16Rms max. or Ra 0.4 ( RMS64 or better) |
Flatness |
0.1mm or 0.15% max |
Tolerance |
+/-0.010" on all dimensions |
5. Table 2 Chemical composition:
Chemistry % |
|||||||||||||
Designation |
Chief component |
Impurities maximum |
|||||||||||
Nb |
Fe |
Si |
Ni |
W |
Mo |
Ti |
Ta |
O |
C |
H |
N |
||
Nb1 |
Remainder |
0.004 |
0.003 |
0.002 |
0.004 |
0.004 |
0.002 |
0.07 |
0.015 |
0.004 |
0.0015 |
0.002 |
|
Nb2 |
Remainder |
0.02 |
0.02 |
0.005 |
0.02 |
0.02 |
0.005 |
0.15 |
0.03 |
0.01 |
0.0015 |
0.01 |
Special requirements to be agreed on by the supplier and buyer of negotiations |
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